UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS

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2026-06-11 23:58
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Conference: Bucharest University Faculty of Physics 2026 Meeting


Section: Nuclear and Elementary Particles Physics


Title:
Quantitative depth profiling and compositional analysis of nanoscale layers using Rutherford backscattering spectrometry


Authors:
Andrei ALDINI (1,2), Decebal IANCU (1), Andreea MITU (1), Nicoleta FLOREA (1), Ion BURDUCEA (1)


Affiliation:
1) Horia Hulubei National Institute for Research and Development in Physics and Nuclear

Engineering, 30 Reactorului St., 077125, Măgurele, Romania

2) University of Bucharest, Faculty of Physics, Măgurele, Romania



E-mail
aldiniandrei2002@gmail.com


Keywords:
Ion beam analysis; Rutherford backscattering spectrometry; 3 MV Tandetron accelerator


Abstract:
Precise control over composition and thickness is critical for optimizing thin-film performance in modern electronics, optics, and surface engineering. Among the various Ion Beam Analysis (IBA) techniques available to evaluate these nanoscale layers, Rutherford Backscattering Spectrometry (RBS) stands out as a premier tool in terms of measuring stoichiometry and thin film thickness. This presentation highlights the capabilities of RBS in thin-film characterization, featuring experimental measurements performed using the 3 MV Tandetron accelerator at IFIN-HH.


References:

[1] Wei-Kan Chu, James W. Mayer, Marc-A. Nicolet, Chapter 4 - Backscattering Spectrometry of Thin Films, Backscattering Spectrometry, Academic Press, 1978, Pages 89-122

[2] I. Burducea, M. Straticiuc, D.G. Ghiță, D.V. Moșu, C.I. Călinescu, N.C. Podaru, D.J.W. Mous, I. Ursu, N.V. Zamfir, A new ion beam facility based on a 3MV Tandetron™ at IFIN-HH, Romania, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 359, 2015, Pages 12-19

Acknowledgement:
The Core (Nucleu) Programme, project PN 23210201. Experiments were carried out at 3 MV Tandetron accelerator from IFIN-HH and were supported by the Romanian Government Programme through the National Programme for Infrastructure of National Interest (IOSIN).